Research conducted by Festo finds a new generation of its low-energy flow-control valves utilized by Front Opening Unified Pods (FOUPs) purge systems can reduce Nitrogen gas (N2)  consumption by as much as 75%. A new Festo white paper details how these piezo-based flow-control systems help semiconductor fabrication plants (Fabs) reduce their carbon footprint and lower energy costs.

Festo introduces Controlled Pneumatics, a digital closed-loop control strategy for delivering energy efficiency, high dynamic response, and precision movement. Controlled Pneumatics is an ideal solution for web tensioning; welding; surface processing; flexible gripping, including vacuum gripping; dispensing and pumping; PET bottle blowing; and diaphragm pump control.

Festo introduces the VEFC mass flow controller, the company’s latest entry into its Controlled Pneumatics family of solutions. The VEFC features precisely controlled flow of inert gases of up to 200 l/min and is one of the most compact mass flow controllers on the market – only 24 mm wide. Like all Controlled Pneumatics solutions, the VEFC features energy efficient piezoelectric valve technology integrated with control algorithms and ...