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Digital precision for higher wafer yield
At Semicon Europe 2026, Festo will be presenting solutions based on Controlled Pneumatics, a new generation of digitally controlled pneumatic technology. Through the precise control of pressure, flow and motion, the technology helps machine builders and semiconductor manufacturers to design their systems efficiently and with future-proof capabilities. The results include greater process reliability, longer maintenance intervals, reduced vibrations and particle formation, as well as increased yield, optimised resource consumption and lower operating costs.
Thanks to closed-loop control, Controlled Pneumatics regulates precisely and stably without hysteresis – as implemented, for example, in Festo’s VESC valve for actuating wafer transfer valves. The repeatability is ±0.25 per cent of the setpoint. The particle size per switching operation is just 0.1 µm, which is around five times lower than with conventional proportional pressure regulators. Furthermore, the valves consume up to 95 per cent less energy than comparable solenoid valves. This precise control can also reduce compressed air consumption by up to 50 per cent.
Fewer particles, longer service life for isolation valves
Wafer transfer valves (gate valves) play a key role in wafer manufacturing plants. They open and close during the transport of wafers between load locks and process chambers. If these movements are carried out too abruptly, shocks and vibrations occur which can accelerate wear and release particles.
With the VESC valve, Festo also offers a solution for the precise motion control of ISO valves. The valve enables smooth start and stop movements whilst maintaining high speed in the mid-stroke range. This reduces mechanical stress, extends the service life of components and minimises particle generation.
Protecting wafers and reducing nitrogen consumption
During storage and transport, wafers are kept in so-called Front-Opening Unified Pods (FOUPs). A controlled nitrogen atmosphere is required to protect the sensitive components from oxygen and particle contamination.
Festo’s VEFC mass flow controller continuously and precisely regulates the nitrogen flow to the required setpoint. This allows the flow rate per FOUP to be reduced. Compared with conventional solutions, savings of up to 75 per cent can be achieved. In large wafer fabs, total nitrogen consumption can be reduced by up to 18 per cent.
For applications with multiple FOUP positions, Festo offers the VTEP multi-channel mass flow controller. Instead of installing a separate controller at each purge point, multiple purge processes can be controlled via a central EtherCAT-compatible valve island with two, five or eight channels. This simplifies the machine architecture and reduces installation effort.
Qualification required
Targeted training programmes are provided by Festo Didactic. The range includes practical training at the factories, the establishment of in-house training facilities, and digital learning content on the Festo Learning Experience (Festo LX) – including topics relating to sustainability.
Festo at Semicon Europe in Munich: in Hall C1 at Stand C1337
Festo is a global player and an independent family-owned company with headquarters in Esslingen am Neckar, Germany. Festo has set standards in industrial automation technology and technical education ever since its establishment, thereby making a contribution to sustainable development of the environment, the economy and society. The company supplies pneumatic and electrical automation technology to 300,000 customers of factory and process automation in over 35 industries. Digitalization, AI and the LifeTech sector with medical technology and laboratory automation are becoming increasingly important. The products and services are available in 176 countries. With about 20,600 employees in over 250 branch offices in around 60 countries worldwide, Festo achieved a turnover of around €3.33 billion in 2025. More than 8% of this turnover is invested in research and development. In this learning company, 1.5 % of turnover is invested in basic and further training. Festo Didactic SE is a leading provider of technical education and training and offers its customers worldwide comprehensive digital and physical learning solutions in the industrial environment.
