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Digital Precision for Higher Wafer Yield
At Semicon Europe 2026, Festo will present solutions based on Controlled Pneumatics, a new generation of digitally controlled pneumatic technology. By precisely controlling pressure, flow, and motion, the technology helps machine builders and semiconductor manufacturers design their systems to be efficient and future-proof. The results include greater process reliability, longer maintenance intervals, reduced vibrations and particle formation, as well as increased yield with optimized resource consumption and lower operating costs.
Thanks to closed-loop control, Controlled Pneumatics provides precise and stable control without hysteresis—as implemented, for example, in Festo’s VESC valve for actuating wafer transfer valves. The repeatability is ±0.25% of the setpoint. The particle size per switching operation is only 0.1 µm, which is about five times lower than with conventional proportional pressure regulators. In addition, the valves consume up to 95% less energy than comparable solenoid valves. This precise control can also reduce compressed air consumption by up to 50%.
Fewer particles, longer service life of isolation valves
Wafer transfer valves (gate valves) play a central role in wafer manufacturing facilities. They open and close during the transport of wafers between load locks and process chambers. If these movements are performed too abruptly, they can cause shocks and vibrations that accelerate wear and may release particles.
With the VESC valve, Festo also offers a solution for precise motion control of ISO valves. The valve enables smooth start and stop movements while maintaining high speed in the mid-stroke range. This reduces mechanical stress, extends the service life of components, and minimizes particle generation.
Protecting wafers and reducing nitrogen consumption
During storage and transport, wafers are kept in so-called Front-Opening Unified Pods (FOUPs). A controlled nitrogen atmosphere is required to protect the sensitive components from oxygen and particle contamination.
Festo’s VEFC mass flow controller continuously and precisely regulates the nitrogen flow to the required setpoint. This reduces the flow rate per FOUP. Compared to conventional solutions, savings of up to 75 percent can be achieved. In large wafer fabs, total nitrogen consumption can be reduced by up to 18 percent.
For applications with multiple FOUP positions, Festo offers the VTEP multichannel mass flow controller. Instead of installing a separate controller at each purge point, multiple purge processes can be controlled via a central EtherCAT-enabled valve island with two, five, or eight channels. This simplifies the machine architecture and reduces installation effort.
Qualification Required
Festo Didactic offers targeted training programs. The offerings include hands-on training at the plants, the setup of in-house training facilities, and digital learning content on the Festo Learning Experience (Festo LX)—including topics related to sustainability.
Festo at Semicon Europe in Munich: in Hall C1 at Booth C1337
Festo is a global player and an independent family-owned company with headquarters in Esslingen am Neckar, Germany. Festo has set standards in industrial automation technology and technical education ever since its establishment, thereby making a contribution to sustainable development of the environment, the economy and society. The company supplies pneumatic and electrical automation technology to 300,000 customers of factory and process automation in over 35 industries. Digitalization, AI and the LifeTech sector with medical technology and laboratory automation are becoming increasingly important. The products and services are available in 176 countries. With about 20,600 employees in over 250 branch offices in around 60 countries worldwide, Festo achieved a turnover of around €3.33 billion in 2025. More than 8% of this turnover is invested in research and development. In this learning company, 1.5 % of turnover is invested in basic and further training. Festo Didactic SE is a leading provider of technical education and training and offers its customers worldwide comprehensive digital and physical learning solutions in the industrial environment.
