ID: 2563

No more oxidised wafers

Oxygen-free production with the N2 purge system

When wafers need to be transported and stored in the semiconductor industry, the N2 purge system from Festo prevents oxygen from oxidising the wafers. The cost-efficient, pre-assembled flow controller continuously supplies the wafer reservoir (FOUP) with inert nitrogen for this.

Both the generally restricted space in the production area as well as the strict quality demands for the operating equipment have been taken into consideration in the system solution N2 purge. Costs for assembly and tubing as well as test times are reduced, since the user receives a pre-assembled functional unit instead of several individual components. Expenses for an extra stainless-steel tube with fittings are eliminated. The flow controller can also be integrated into an overhead transport system to transport wafers safely.


Long service life, no wear

The design of the piezo valve reduces the risk of contamination in the gas flow caused by particle abrasion over the entire service life. The peak value is approximately for a particle of size 0.1 micrometres per switching cycle. Conventional solutions generate five times the particle content. The piezo technology used prevents wear due to friction, thus considerably lengthening the service life of the valve. In comparison to conventional solutions, this results in significant savings in operation and maintenance.


Leak-proof and economical

The compact flow controller has just two pneumatic connections, reducing the risk of leakages. The energy consumption is less than a watt. In both cases that is 80% less than with conventional solutions such as proportional regulators. The closed control loop ensures an accurate, stable and linear behaviour of the flow rate – without hysteresis. The repetition accuracy is +/-0.25% of the setpoint value.

Festo is a global player and an independent family-owned company with headquarters in Esslingen am Neckar, Germany. Festo has set standards in industrial automation technology and technical education ever since its establishment, thereby making a contribution to sustainable development of the environment, the economy and society. The company supplies pneumatic and electrical automation technology to 300,000 customers of factory and process automation in over 35 industries. Digitalization, AI and the LifeTech sector with medical technology and laboratory automation are becoming increasingly important. The products and services are available in 176 countries. With about 20,600 employees in over 250 branch offices in around 60 countries worldwide, Festo achieved a turnover of around €3.65 billion in 2023. Each year around 7% of this turnover is invested in research and development. In this learning company, 1.5 % of turnover is invested in basic and further training. Festo Didactic SE is a leading provider of technical education and training and offers its customers worldwide comprehensive digital and physical learning solutions in the industrial environment.

© Festo SE & Co. KG
N2 purge
When wafers need to be transported and stored in the semiconductor industry, the N2 purge system from Festo prevents oxygen from oxidising the wafers.  

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