No more oxidised wafers
When wafers need to be transported and stored in the semiconductor industry, the N2 purge system from Festo prevents oxygen from oxidising the wafers. The cost-efficient, pre-assembled flow controller continuously supplies the wafer reservoir (FOUP) with inert nitrogen for this.
Both the generally restricted space in the production area as well as the strict quality demands for the operating equipment have been taken into consideration in the system solution N2 purge. Costs for assembly and tubing as well as test times are reduced, since the user receives a pre-assembled functional unit instead of several individual components. Expenses for an extra stainless-steel tube with fittings are eliminated. The flow controller can also be integrated into an overhead transport system to transport wafers safely.
Long service life, no wear
The design of the piezo valve reduces the risk of contamination in the gas flow caused by particle abrasion over the entire service life. The peak value is approximately for a particle of size 0.1 micrometres per switching cycle. Conventional solutions generate five times the particle content. The piezo technology used prevents wear due to friction, thus considerably lengthening the service life of the valve. In comparison to conventional solutions, this results in significant savings in operation and maintenance.
Leak-proof and economical
The compact flow controller has just two pneumatic connections, reducing the risk of leakages. The energy consumption is less than a watt. In both cases that is 80% less than with conventional solutions such as proportional regulators. The closed control loop ensures an accurate, stable and linear behaviour of the flow rate – without hysteresis. The repetition accuracy is +/-0.25% of the setpoint value.
费斯托 (Festo)是一家全球性的独立的家族企业，总部位于德国埃斯林根。自成立以来，Festo在工业自动化技术和技术教育方面制定标准，从而为环境、经济和社会的可持续发展做出贡献。公司为超过35个行业的30万家工厂和过程自动化客户提供气动和电驱动自动化技术解决方案，其中生命科学和实验室自动化业务受到越来越多的关注。Festo产品和服务遍布176个国家。2023年，费斯托在全球61个国家的250多个分支机构拥有约20600名员工，实现销售额36.5亿欧元。每年约7%的销售额用于研发。在这家学习型企业，1.5%的销售额用于基础和进一步培训。Festo 教学培训 (Didactic SE) 是全球领先的技术教育和培训供应商，为全球客户提供工业环境中全面的数字化和常规学习解决方案。
