在2026年SEMICON Europa展会上，Festo将展示如何让晶圆在半导体制造过程中高效、精准且可靠地流转。 一套联网的演示系统完整呈现了从FOUP开始，经晶圆对准，直至在湿法化学或真空应用中进行后续处理的完整工作流程。

The rising demand for specialised semiconductors – ranging from MEMS and SiC PowerChips to 2 nm GPUs and AI accelerators – is increasing the pressure on fabs and OEMs to operate their equipment cost-effectively whilst maintaining high process stability and repeatability. With solutions based on Controlled Pneumatics, a new generation of digitally...