Precise control of inert gases
Wherever inert gases need to be precisely controlled, the mass flow controller VEFC from Festo is the right choice. Thanks to piezo technology, it is compact and flexible, and offers an excellent price/performance ratio. It is especially suitable for use in electronics manufacturing, food production, and anywhere in machine building where shielding gas is required.
The mass flow controller VEFC from Festo is one of the most compact on the market, while capable of a flow rate of 200 l/min. Thanks to digitalization, the flow rate remains constant. This means that this dynamic, directly controlled piezo valve for inert gases doesn't have to be adjusted manually. It only takes milliseconds to precisely adjust the flow rates and their settings, and they remain tamper-proof. This provides users with the flexibility they need for their production processes. In addition, the VEFC allows them to continuously monitor processes since the flow rate and output pressure are always transparent.
Reliable protection of wafers
Reliably controlling the flow of inert gases such as nitrogen is particularly important in the semicon industry in order to avoid damaging wafers. By focusing on inert gases without media separation, the VEFC proves to be a favorable alternative to other solutions on the market when controlling nitrogen in load ports or EFEMs.
Economical, reliable, and precise N2 purging
Different flow rates can be controlled in the individual purge steps by having VEFC in the load port. It ensures that only the absolutely necessary amount of nitrogen is used, whether during pre-blowing, pre-purge, process purge and post-purge. Users thus save nitrogen and shorten the processing time until the dry shielding gas atmosphere has been reached.
Festo is a global player and an independent family-owned company with headquarters in Esslingen am Neckar, Germany. Festo has set standards in industrial automation technology and technical education ever since its establishment, thereby making a contribution to sustainable development of the environment, the economy and society. The company supplies pneumatic and electrical automation technology to 300,000 customers of factory and process automation in over 35 industries. Digitalization, AI and the LifeTech sector with medical technology and laboratory automation are becoming increasingly important. The products and services are available in 176 countries. With about 20,600 employees in over 250 branch offices in around 60 countries worldwide, Festo achieved a turnover of around €3.65 billion in 2023. Each year around 7% of this turnover is invested in research and development. In this learning company, 1.5 % of turnover is invested in basic and further training. Festo Didactic SE is a leading provider of technical education and training and offers its customers worldwide comprehensive digital and physical learning solutions in the industrial environment.
